摘要
以C++Builder6.0为开发工具,成功设计和编制了一套椭偏法数据处理软件,它具有求解透明膜厚度、折射率和金属复折射率以及绘制(n,d)～(Ψ,Δ)列线图的功能,求解膜厚和折射率精度分别达到0.01nm和0.001.实验表明该软件的求解结果是准确和可靠的.
With the help of C^(++) Builder 6.0, a software for the ellipsometric data processing is successfully designed. It has the function of calculating the thickness and refractive index of film and the complex refractive index, and plots the (n,d)～(Ψ,Δ) curves. The calculated precisions of the thickness and refractive index of film are 0.01 nm and 0.001 respectively. The experiments show that the calculated results are accurate and reliable.
出处
《大学物理》
北大核心
2004年第9期41-45,共5页
College Physics
基金
广东省工业攻关项目(C60109)
关键词
椭圆偏振术
椭偏仪
数据处理
软件
薄膜
ellipsometry
ellipsometer
data processing
software
film
