非线性光学Ge-Ga-S-Se薄膜的制备与表征

Second-order Optical Non-linearity of the Ge-Ga-S-Se Glass Film

随着集成光学的发展 ,人们越来越关注硫系玻璃的二阶非线性光学性质的研究。用熔融淬冷方法制得了 2个组分的 Ge- Ga- S- Se块体玻璃 ,并以此作靶材 ,利用磁控溅射的方法制备了玻璃薄膜。利用 DSC,紫外 -可见光谱仪 ,XRD,SEM,Raman光谱仪 ,XPS分析了其结构。用 Maker条纹法检测到了 2种玻璃薄膜的二阶非线性。结果表明 :用磁控溅射方法可以制得厚度均匀密实的硫系玻璃薄膜 ,由于偶极子的择优取向导致硫系玻璃具有较大的二阶非线性 。

With the development of the integrated optics,more and more significance is being emphasized on the research of the second-order optical non-linearity of chalcogenide glasses.Ge-Ga-S-Se glasses of two compositions (10% Se glass and 20% Se glass) were prepared by conventional quench method. Amorphous films were deposited by magneto sputtering from the bulk glasses. DSC, UV-visible spectrophotometer, XRD, SEM, Raman, XPS were used to determine the structure of the bulk glasses and the films. Maker fringes were detected in the films. The results indicated that homogenous glass films could be made in various thicknesses. SHG occurred due to the directional alignment of the bipolar during the sputtering process. As the Se content increases, the SHG became larger.