精密定位装置光栅倾斜时的定位精度

Alignment accuracy of grating inclination for precision alignment systems

介绍了激光莫尔信号精密定位装置中光栅倾斜时莫尔信号的位移特性,给出了光栅倾斜时差动式和修正式精密定位方法、定位精度的计算机仿真计算结果,说明了装置中光栅设定的角度倾斜如何影响精密定位装置的定位精度。

Displacement characteristics of laser moire signals of the grating inclination for moire precision alignment systems are introduced.The alignment method and the calculated result of the alignment accuracy for differential moire system and modified moire system using computer simulation are given,and how the alignment accuracy of precision alignment system affected by the inclination of gratings is explained.