摘要
利用有限元分析工具ANSYS,对所设计的硅基微结构气体传感器的温度场进行了模拟。运用实体建模的方法建立了传感器衬底的多层结构模型,采用8节点等参数热单元solid70进行了分析。根据器件工作时需要的加热功率,设计了这种硅基气体传感器衬底微加热器的尺寸,确立了对流和环境温度等边界条件,从而达到气体传感器衬底的温度场分布均匀的要求。
The temperature distributing of micro-structure gas sensor based on silicon substrate is simulated by means of finite element analysis(FEA)tool ANSYS.The multiple structure model of the micro-structure gas sensor is established and analyzed using substantiality modeling,and analyzed by eight-node parameter element solid70.This micro-hotplate dimension is designed,as well as the limit conditions of convection and surrounding are built in according to the demands of gas sensor working.The uniformity result of temperature distributing has been achieved.
出处
《测控技术》
CSCD
2004年第5期12-13,共2页
Measurement & Control Technology
基金
国家自然科学基金资助项目(60104006)
关键词
硅基
气体传感器
微加热器
有限元分析
温度分布
si-substrate
gas sensor
micro-hotplate (MHP)
finite element analysis (FEA)
temperature distributing
