溶胶–凝胶法制备BaTiO_3薄膜的研究

The Study of BaTiO_3 Thin Film Prepared by Sol-gel

以醋酸钡和钛酸丁酯为原料,应用溶胶–凝胶法在 Al2O3基片上制备了 BaTiO3薄膜。具体分析了原料、溶剂、催化剂、溶液的 pH 值、螯合剂和表面活性剂对溶胶–凝胶体系的影响,以及加水量、乙二醇加入量和醋酸对溶胶–凝胶黏度的影响。并且可以把掺杂离子加入到溶胶–凝胶中,为调节 BaTiO3薄膜的性能打下了良好的基础。

BaTiO_3 thin film was prepared on Al_2O_3 substrate by sol-gel process, using barium acetate and titanium tetrabutoxide as raw materials. The effects of raw materials, different solvents, catalysts, pH value, chelating agent, surfactant on the process of sol-gel and the volume of water, glycol and acetic acid on the viscosity of the sol-gel have been investigated. It has succeeded in putting Y into the sol-gel which is very important in accommodating the property of the BaTiO_3 thin film.