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钴、锰掺杂氧化锌薄膜的制备和特性研究 被引量:2

Study of preparation and properties of Zn_(0.80)Co_(0.15)Mn_(0.05)O thin films
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摘要 在200~500℃的衬底温度范围内,用电子束蒸镀法在Si衬底上制备了沿[002]取向的Zn0.80Co0.15Mn0.05O薄膜。这些薄膜都具有室温铁磁性,薄膜磁性随衬底温度的增大,在400℃出现极大值。X射线分析则表明,除200℃制备的薄膜结晶和取向较差外,其它温度的薄膜都沿C轴高度取向,(002)面间距和衍射峰半高宽(FWHM)接近相等。讨论了衬底温度对薄膜晶体结构和磁性的影响。 Zn_(0.800Co_(0.150Mn_(0.050O thin films prepared by method of e-beam evaporation on Si substrate at 200~500℃for substrate temperatures(Ts) are characterized using x-ray diffraction method, which shows all these films orientating well along \ except the film prepared at 200℃ and having similar crystal parameters. All these films having ferromagnetism at room temperature are found.Saturated and renament magnetization of the film grown at 400℃ is larger than one at other temperatures.The effect of Ts on crystal structures and magnetization of the films are discussed.
机构地区 安徽大学物理系
出处 《安徽大学学报(自然科学版)》 CAS 2004年第4期38-42,共5页 Journal of Anhui University(Natural Science Edition)
基金 安徽省科技厅年度重点基金资助项目(01041188) 安徽省省级重点课程"普通物理"建设基金资助项目
关键词 掺杂 氧化锌薄膜 制备 室温磁性 衬底温度 电子束蒸镀 Zn_(0.80)Co_(0.15)Mn_(0.05)O film room temperature magnetism substrate temperature e-beam evaporation
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参考文献8

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