压电谐振式水平姿态传感器研究

Study on Piezoelectric Resonator Type Level Posture Sensor

介绍了利用石英晶片频率的力敏效应制作的水平姿态传感器及其敏感头的结构。分析了敏感头结构参数与传感器的标度因数、线性度等技术指标的关系,并指出了该传感器需要进一步研究的问题。目前,压电谐振式水平姿态传感器样机的分辨率优于0.001 4°,在2°的范围内,标度因数达1.60 Hz/5″,非线性度不大于0.13%。

Presented were the principle of piezoelectric resonator type level posture sensor and the structure of sensitive element. This sensor was made by the force sensitive effect of quartz crystal frequency. The relations of the structure parameters of sensitive element with the ration coefficient and linearity of sensor have been analyzed. Further problems for developing this sensor were also indicated. The prototype of piezoelectric resonator level posture sensor has distinguish ability better than 0.001 4°, and the ration coefficient is 1.6 Hz/5', and nonlinearity is no more than 0.13% in the scope of 2 .