期刊文献+

混合微电子技术在氧化锆基氧传感器上的应用 被引量:1

Application of Mixture-microelectronic Technology on the Oxygen Sensors Based on Zirconia
下载PDF
导出
摘要 用厚膜、薄膜和叠片工艺制作的氧传感器,降低了总阻抗,从而降低了工作温度和缩短了响应时间。通过测量电离或催化反应得到的氧,极限电流型气体传感器的测量范延伸到H2O、CO2、H2、CO和HCs。采用离子-电子混合导体膜作为扩散控制层改善了电流测量型传感器的性能。与掺杂Y2O3稳定的ZrO2相比,采用掺杂In2O3、Y2O3稳定的ZrO2可抑制老化时电导率的降低。用高能球磨技术可以制备3价阳离子稳定的氧化锆。 Oxygen sensors fabricated by thick-film, thin-film, and lamination technology decreased total impedance leading to the decreases of working temperature and reducing response time. Limiting-current-type gas sensors have been extended and used to detecte H2O, CO2, H2, CO, and HCs through measuring oxygen produced by electro-dissociation or catalytic reaction. Application of mixed ionic-electronic conductor membrane as diffusion-controlled layer improved sensing properties of amperometric sensor. In2O3, Y2O3-stabilized zirconia has can suppress the decrease of conductivity with aging as compared with Y2O3-stabilized zirconia. Trivalente cation-stabilized zirconia has been prepared using the high-energy ball milling technique.
作者 俞守耕
出处 《贵金属》 CAS CSCD 2004年第3期62-66,共5页 Precious Metals
关键词 氧化锆 氧传感器 电位测量型传感器 电流测量型传感器 电阻型传感器 气体传感器 混合微电子技术 Sensor technology Potentiometric sensor Amperometric sensor Resistive-type sensor Thick-film Thin-film
  • 相关文献

参考文献21

  • 1Vasylkiv O, Sakka Y. Nonisothermal synthesis of yttria-stabilized zirconia nanopowder through oxalate processing:I, Characteristics of Y-Zr oxalate synthesis and its decomposition [J]. J. Am. Ceram. Soc., 2000, 83 (9):2196-2202.
  • 2Komachiya M, Suzuki S, Fujita T, et al. Limiting-current type air-fuel sensor using porous zirconia layer without inner gas chambers: proposal for a quick-startup sensor [J]. Sensors and Actuators B, 2001, 73(1): 40-48.
  • 3Bae J W, Park J Y, Hwang G Y, et al. Characterization of yttria-stabilized zirconia thin films prepared by radio frequency magnetron sputtering for a combustion control oxygen sensor [J]. J. Electrochem. Soc., 2000, 147(6):2380-2384.
  • 4Jong-Heun L, Mori T, Ji-Guang L, et al. Improvement of grain-boundary conductivity of 8 mol% yttria-stabilized zirconia by precursor scavenging of siliceous phase [J]. J. Electrochem. Soc., 2000, 147(7): 2822-2829.
  • 5Rivera A, Santamaria J, Leon C. Electrical conductivity relaxation in thin-film yttria-stabilized zirconia [J]. Appl.Phys. Lett., 2001, 78(5): 610-612.
  • 6Jong-Heun L, Toshiyuli M, Ji-Guang L, et al. Precursor scavenging of resistive grain-boundary phase in 8 mol% ytterbia-stabilized zirconia [J]. J. Electrochem. Soc., 2002, 149 (3): J35-J40.
  • 7Robertson N L, Michaels J N. Oxygen exchange on platinum electrodes in zirconia cells: Location of electrochemical reaction sites [J]. J. Electrochem. Soc., 1990, 137 (1): 129-135.
  • 8Makovos E B, Liu C C. Development of a solid electrolyte sensor for oxygen in hot gases [J]. Sensors and Actuators B, 1991, 3 (1): 15-22.
  • 9Kohno K, Takeda Y, Imanishi N, et al. Preparation and characterization of platinum-ceramic composite powders and thin films [J]. J. Am. Ceram. Soc., 1993, 76(1): 192-196.
  • 10Chu W F, Leonhard V, Erdmann H, et al. Thick-film chemical sensors [J]. Sensors and Actuators B, 1991, 4 (3-4):321-324.

同被引文献7

引证文献1

二级引证文献2

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部