大尺寸0.55mm ITO透明导电膜玻璃的翘曲度

Warp of large area 0.55mm ITO conductive coating glass

ITO透明导电膜玻璃的翘曲度是评价大尺寸薄基片ITO玻璃的重要指标之一。利用磁控射频溅射技术制备了ITO薄膜。研究了基片加热前、后的翘曲度和ITO膜层应力对ITO玻璃翘曲度的影响以及ITO成膜温度分布对ITO玻璃翘曲度的影响。结果表明,薄基片ITO玻璃的翘曲度主要是在镀膜时ITO膜层压应力大引起的,选择合适的成膜温度分布可明显减小ITO玻璃的翘曲度。

Warp is one of the important quality indexes evaluating the large area ITO conductive coating thin glass. By using radio freqency(RF) magnetic sputter technology, the deposition process of ITO coating is completed. Research is made on the warp of the raw glass substrates and the heated glass substrates, the influence of ITO layer stress on the warp of ITO conductive coating glass, and the influence of the distribution of coating temperature on the warp of ITO conductive coating glass. The results show that the pressure stress of ITO layer is the major factor that influences the warp of ITO conductive coating thin glass, the warp of ITO conductive coating glass can be reduced obviously at appropriate distribution of coating temperature.