溶胶-凝胶方法制备铁电薄膜及其力学性质的研究

Study on Mechanical Properties of Ferroelectrics Thin Films Prepared by Sol-gel Method

本文介绍用溶胶-凝胶方法制备钛酸铅镧(PLT)铁电膜,采用划痕法测定PLT膜在Si基片上的附着力,并通过x射线衍射(XRD)测定在各种工艺条件下PLT薄膜的晶格畸变,并计算内应力。实验表明溶胶-凝胶方法的工艺因素对薄膜的力学性质有很大影响。通过控制溶液浓度,热处理温度及薄膜的厚度可得到附着力强,内应力小,品格畸变小的优质膜。

Ferroelectric (Pb, La)TiO_3 (PLT) thin films have been prepared on Si wafer by sol-gel method. The PLT thin films were scratched and its adhension on Si wafer were measured. The data on structure deformation versus processing conditions have been obtained by XRD technique, and internal stress were calculated The experimental results have shown that the processing conditions give large influence on mechanical properties of sol-gel films.