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高功能材料—聚硅炔的研究现状 被引量：1

The Present Investigation of Polysilynes—a High—Performance Materials
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摘要 本文综述了一类新型的高功能材料——聚硅炔的合成、结构、反应以及作为半导体、导电性SiC薄膜、光学波导器和光致抗蚀剂的应用的研究现状。 Polysilynes, a new kind of high-performance materials, are reviewed on the present investigation of their synthesis, structure, reactions and applications as semiconductors, conductive SiC thin films, optical waveguides and photoresists.
作者 李高全 陈德本 贺建业
机构地区 四川大学化学系
出处 《功能材料》 EI CAS CSCD 1993年第5期385-390,共6页 Journal of Functional Materials
关键词 聚硅炔 半导体 SIC薄膜 光学波导器 polysilyne semiconductors SiC thin film optical waveguide photoresists
分类号 TN304.5 [电子电信—物理电子学]
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功能材料
1993年 第5期

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