微面形貌光电观测系统的光学结构

Optical System of Micro-Profile Inspection

针对微小面积,特别是微小"盲孔"底面形貌的非接触精密检测,提出了一种基于直接成像原理的光学结构.采用内窥式镜头解决数值孔径受限问题;通过定变焦距镜头组合达到低倍定位和高倍分析要求;利用光学微扫描器实现扫描瞄准功能.针对FC、SC光纤连接器构造设计,探测头可深入内径2.5mm盲孔,设计分辨率达到600lp/mm,主要应用于光纤端面检测、精密制造和临床诊断等领域.

An opto-electronic inspection system based on the direct imagery theory is presented for non-contact observation of the micro-profile of a small area, especially that of the underside of a micro-pore. The system resolves the problem of numerical aperture by means of an endoscope.Through the combination of object lenses and zoom lenses, the requirements of searching targets at low amplifications and analyzing objects at high amplifications are achieved. A precise optical scanner in it can locate blemishes in the small area inside the micro-pore. The multi-functional utilization and miniaturization of the system are also taken into account. This design is applied in fiber end inspection in FC or SC fiber adapters. The endoscope can be placed in 2.5 millimeter-diameter micro-pore. The resolution is increased to 600 line-pairs per millimeter. It also has significant utilization in other fields such as advanced manufacture, clinical diagnosis, etc.