管腐蚀法制作纳米光纤探针

Fabrication of nanometric optical fiber probe by tube etching method

根据优质探针的理论模型 ,利用管腐蚀法制作了可用于光纤生物传感器的纳米光纤探针 ,该制作方法操作方便 ,成本低廉 ,易于批量生产 ,且受环境的影响较小 ,制作的光纤探针具有较高的重复率。所获探针锥径小于 5 0nm ,锥角为 4 5°。

According to a theoretical model of making high quality probe,we make the nanometric optical fiber probe that can be utilized in optical fiber biological sensor with tube etching method.This method is easy to manipulate and produce with relatively low cost.Moreover,it is not so sensitive with the experimental environment,so the repeative rate of making optical fiber probe is relatively high.The tips diameters are less than 50nm,and the taper angle 45°.We finally analyze and discuss the shape of optical fiber probe under the effect of some uncertain factors during the tube etching experiment.