显微高光谱成像系统的设计

Design of microscopic hyperspectral imaging system

设计出一种基于棱镜 光栅 棱镜组合分光方式的显微高光谱成像实验系统。系统根据推帚式成像光谱仪的原理进行设计,采用棱镜 光栅 棱镜组合元件在后光学系统进行光谱分光,利用高精度载物台自动装置驱动样品进行推扫成像,选用PCI总线作为数据采集的微机接口。整个系统由显微镜、分光计、面阵CCD相机、载物台自动装置以及数据采集与控制模块等几部分组成。系统的光谱范围从400nm到800nm,120个波段,光谱分辨率优于5nm,空间分辨率大约1μm。该系统具有直视性、光谱分辨率高、结构紧凑、成本低等优点;不仅能够提供微小物体在可见光范围的单波段显微图像,而且能够获得图像中任一像素的光谱曲线,实现了光谱技术和显微成像技术的结合,成功的将成像光谱技术应用到显微领域,可广泛应用于临床医学、生物学、材料学、微电子学等学科领域。

A novel microscopic hyperspectral imaging system was presented,and its operating principle,structure,hardware and software design were discussed.The system was designed based on the principle of pushbroom hyperspectral imager,direct vision dispersing prism-grating-prism component was used as spectrum-dividing component,and PCI bus was used as computer interface of high-speed imaging spectral data acquiring subsystem. The whole system was composed of a microscope,a spectrometer,an area CCD camera,an automatic stage and data acquisition and control subsystem. Comparing to other spectrum-dividing technologies,the prism-grating-prism has advantages such as direct vision,high spectral resolution,compact structure and low cost. The system is capable of performing spectral imaging inplenty of spectral bands and micro-spectroscopy in any image pixel,in the spectral range 400 through 800 nm.The spectral resolution is less than 5 nm,and the spatial resolution is about one imicrometre. The system can be applied to a lot of fields,such as clinic medicine,biology,material science,microelectronics. The analysis results show that it can be successfully to apply hyperspectral imaging technique to microscopic fields by combining spectral imaging with microscopic imaging technique.