摘要
综述了等离子体产生的原理,小型等离子清洗蛐刻蚀机的特点,在各加工行业的应用,特别是在科研机构发挥了举足轻重的作用,包括等离子清洗、刻蚀、等离子镀、等离子涂覆、等离子灰化和表面改性等。论述了小型等离子清洗蛐刻蚀机在TEM、SEM、电镜等方面的特殊应用。并讨论了等离子处理对于产品的可靠性和过程效率的提高是目前最理想的技术及其优势。
The principle of plasma, characteristics and applications of small sized plasma instruments are introduced, especially its crucial functions in scientific researches: Cleaning, etching, coating, ashing and surface modification. Special uses on TEM and SEM are expatiated. The unique function and advantages that can not be replaced in modern research work are discussed.
出处
《电子工业专用设备》
2004年第9期33-38,共6页
Equipment for Electronic Products Manufacturing
关键词
等离子清洗
刻蚀
表面处理
Plasma cleaning
Plasma etching
Surface modification
