摘要
采用溶胶-凝胶工艺在玻璃基片上制备Al3+掺杂型的ZnO(AZO)透明导电薄膜,对薄膜进行了XRD和SEM分析,并对其光电性能作了详细的研究.结果表明:薄膜为纤锌矿型结构,呈c轴方向择优生长;薄膜的可见光透过率可达80%以上;Al3+掺杂型的ZnO透明导电薄膜的电阻率为1.5×10-2～8.2×10-2 Ω·cm.
AZO(Al:ZnO) films on glass substrate were prepared by sol-gel method. Their microstructures, electrical and optical properties were studied with X-ray diffraction spectroscopy (XRD) and SEM. The results show that they have a polycrystalline hexagonal wurtzite structure with highly preferred orientation along the (002) plane, their optical transmittance are over 80% and their electrical resistivity varied from1 5×10–2 to 8.2×10–2 ?·cm.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2004年第9期31-33,共3页
Electronic Components And Materials
关键词
掺杂浓度
AZO薄膜
溶胶-凝胶
SEM
XRD
电阻率
semiconductor materials
oploeleclronics and laser technology
AZO thin film
sol-gel
electrical and optical properties
