摘要
本文指出了在做傅里叶变换轮廓术(FTP)时,CCD摄象机的调制传递函数(MTF)将使恢复出的物体高度产生误差,文中给出了理论分析,并采用三种MTF曲线做计算机模拟实验,结果表明传递函数的影响将使得恢复出的物面斜率变小。
In this paper, the systematic error of height reconstructed by Fourier trans-form profilometry is pointed out. The error is generated by the modulation transferfunction of CCD camera. Theoretical analysis is presented and the results for simulationcalculation with three types of MTF curves demonstrate that the slope of the recon-structed surface are decreased.
出处
《光电工程》
CAS
CSCD
1993年第3期19-24,共6页
Opto-Electronic Engineering
基金
国家教委博士点基金资助的项目
关键词
轮廓测量
傅里叶变换
CCD摄象机
Profile measurement,Fourier transform,MTF(modulation transfer functions),CCD cameras.
