反射光学式位移检测系统

Novel Displacement Measuring System Using Reflecting Grating

系统由半导体激光器、聚焦镜头、反射式标尺光栅、四裂相指示光栅和光电接收元件组成。该系统具有光学两倍频作用和大光栅副间隙下使用及间隙对莫尔条纹信号调制度不敏感等特点,并且整体结构分离式、小型化和轻型化,在各类精密测量装置和精密加工仪器中将得到越来越广泛的应用。本文介绍这种反射光学式位移检测系统的结构原理,系统特点和应用。

The article touches upon the principle of displacement measuring system consist-ing of diode laser focusing lens, reflecting main scale grating, quarternary index scale grat-ing photosensor. The special optics and novel configuration make a feature of double-frequen-cy function amd insensitivity of Moire fringe modulation signal to gap between the main grat-ing and index grating. The theoretical analysis and experimental results are presented in thepaper.