摘要
利用CCD成象技术研制了一种小光束质量的实时检测系统,从理论和实验上进行了分析研究。首次完成了对半导体激光束的波差测量、这种技术是现代高科技、高精度光学检测中的一种有效方法。
A real time detection system of small beam quality is proposed on the basis ofCCD imaging technieue, and is analysed in the theory and demonstrated in experiments. Thewave front aberration of the semiconductor laser beam is measured by the method for thefirst time. It is an effective method in modern high technology and high precision optical de-tection.
出处
《光电工程》
CAS
CSCD
1993年第4期23-28,共6页
Opto-Electronic Engineering
基金
国家"七.五"科技攻关项目
关键词
激光参数测量
象差测量
数据处理
Laser parameter measurement,Aberration measurement, Real-time measurement,Shearing interferometry,Photoelectric imaging, Image processing.
