用激光全息错位法检测棱镜表面精度

Detection of Prism Surface Precision by Transposition Method of laser Holography

本文介绍了一种用激光全息波面错位来检测棱镜表面精度的方法。具有光路简单、易于调节、精度较高(λ/26)、以及对光学系统主要零件的质量要求较低等特点。

In this paper, It is recommended a wavefront transposition method that measured the precision of prism surface. This method has many traits: simple of optical way, the adjust is simple and easy, the precision (λ/26) is higher than other and the qualilies of major optical element demanded are lower than oter for optical system.