摘要
阐述光镊形成的基本原理,利用几何光学和动量守恒定律对激光势阱中约10μm大小的高强度微粒子(如:金刚石、碳化硅、石英等)受力进行分析。同时建立了实验装置,通过操纵微粒子的运动,实现对硅表面的纳米加工,并通过实验比较,定性分析最佳加工条件(如:激光功率和加工基底参数)。
This paper expounded the principle of optical-tweezer and the mechanism of laser trapping on about 10μm high rigidity micro-particles made of diamond, quartz or silica using geometrical optics and momentum conservation law. The optical-tweezer system for nano-machining is established ,and with which nano-machining is realized by trapping micro-particle.By experimental analysis,the best machining conditions of laser power and machining floor is abtained.
出处
《光学仪器》
2004年第4期16-20,共5页
Optical Instruments
基金
国家自然科学基金资助项目(60106005)
关键词
光镊
微粒子
纳米加工
optical-tweezer
micro-particles
nano-machining
