摘要
采用反应离子镀新工艺成功地在K9玻璃上制备了ITO(Indium Tin Oxide)透明导电膜,所制备的ITO膜在550～600nm波长范围内,典型的峰值透过率为89%,面电阻为34Ω/□。
Films with sheet resistance of 34Ω/□ and peak transmittance of 89% in visible region have been deposited on K9 glass substrate by reactive ion plating deposition.
出处
《光学技术》
CAS
CSCD
1993年第5期21-22,共2页
Optical Technique
关键词
反应离子镀
透明导电膜
光电子技术
reactive ion plating,transparent and electrically conductive ITO films.
