摘要
本文分析了用激光干涉法,使用光杠杆的测微原理,这种测微原理具有精度高、测量快、实时显示的特点,对检测高乎整度器件有广泛的应用。
This paper analyse laser interferometrical micrometric principle by using optical-lever, the principle has high-grade precision, fast-grade measuring,;real-time display characteristic, and can be used in test of high-grade smooth object.
出处
《光学技术》
CAS
CSCD
1993年第6期26-28,共3页
Optical Technique
关键词
干涉
光杠杆
测量
微小位移
interference
optical-lever
meusuring
slight-displacement
