激光干涉测长系统中导轨——床身系统的二维动刚度实验研究

Experimental Study on the Dynamic Stiffness Feature of a Slideway-Bed of an Interferometric Length Measurement System

实践表明,激光干涉测长系统中的导轨—床身系统的动刚度对其测量精度有重大影响,但由于缺乏可靠、高精度的测量方法而往往未能在设计中,或使用中,予以避免或补偿。本文提出了一种采用双路激光干涉仪测试方法,成功地测量了三层结构的导轨—床身系统的二维动刚度。文中介绍了它的原理及装置,并对最终的测量结果进行了讨论。

As well known, the dynamic stiffness of the slideway-bed of a laser interferometric length measurement system will effect on its measurement accuracy severely. However so far, it is not easy to estimate the degree of its effects in advance, or to give certain conpensation just due to the lack of some proper methods to test. In this paper, we introdued a simple but very effective method of using two laser interferometers by which we tested the 2-D dynamic stiffness of the three-layer type of slideway-bed of a laser interferometric length measurement system. The principle of that method and the experimental arrangements are described, and the results and comments are discussed.