二值位相光栅的设计与制作

Design and Fabrication of Binary Phase Grating

我们采用了新的算法对二值位相光栅进行了设计,并对制作时可能产生的误差及它们对位相光栅的衍射效率和光强均匀性的影响进行了讨论。我们用薄膜沉积的方法进行了位相光栅的制作,对光栅进行了实际测量,把测量结果与理论值进行了比较,结论与我们的理论分析相符。

A new design method for binary phase grating used as array generator is presented and the effects of fabrication errors on the efficiency of the grating are investigated. As a example , a phase grating made by using film deposition was tested and the results agree with the theoretical analysis.