激光等离子体软X线光源的研究

Investigation on Soft X-ray Laser Produced Plasma Source

本文设计了一种高精度旋转靶系统的激光等离子体软X线光源,亮度高,强度大,光斑尺寸(100～200)μm,脉冲时间几十纳秒,可以辐射出直至软X线的连续光谱及迭加在连续光谱之上的线光谱,峰值波长位于(13～17)nm。在多次测量取平均的方式下,其稳定性和重复性优于±4.5％。

This thesis designs a Laser -Produced Plasma(LPP) source with high precision rotation target system,, The laser system used as excitation source is a Q-Switched Nb:YAG laser emitting energies from 100mJ to 800mJ at a wavelength of 1. 06um with pulse duration of 8ns (FWHM) and pulse repetition rate of 1Hz.5Hz and 10Hz in combination with two sorts of focusing lenses of 90mm and 240mm focal length. The LPP source developed has short duration of the emission (tens ns), small light spot(100-200um), high brightness and high intensity. It can produce considerable amount of Soft X-ray-Vaccum Ultraviolet spectra radiation both line emission and continue emission. In the mean time,the radiative peak wavelength can be adjusted from 13nm to 17nm. The stability and reproducibility of the LPP source is better than4.5%.