摘要
分析了半导体激光调频干涉仪的测量原理,介绍了几种主要应用。
The measurement principle of the frequency—modulat(?) interferometer using semiconductor laser was described. Several main applications of this it terferometer was presented.
出处
《光学仪器》
1993年第1期18-23,共6页
Optical Instruments
关键词
半导体激光器
测量
调频
Semiconductor laser
Measurement
Freguency modulation