摘要
在单光源、双光源、不同照射角及不同距离等条件下,测试了照射型莫尔轮廓法的光强分布。分析了影响光强分布的因素。
Measurement of the light intensity in illumination moire topography is discribod in this paper. The measurements are took under different conditions, such as, various illuminat angles, single or double sources, various distance. The influence factors on measuring data are analysed.
出处
《光学仪器》
1993年第3期1-4,共4页
Optical Instruments
关键词
照射型
莫尔轮廓法
光强测试
Moire Topography, Light Intensity Measurement
