摘要
应用计算机技术,对圆计量光栅刻划过程的自动控制进行研究,介绍了微机控制细分刻划的原理和该智能控制系统的结构。并且叙述了多种任意等分光栅盘的刻划方法。
Utilizing computer technology, we make researches on the automatic control of radial grating ruling process. The principle of microcomputer—controlled subdivisionsl ruling and the structure of this control system are introduccd in detail The ruling methods of some kinds of arbitrarily equated grating disc are also given.
出处
《光学仪器》
1993年第4期16-20,共5页
Optical Instruments
关键词
任意等分
圆光栅
光刻机
控制系统
Arbitrarily Equating, Subdivisional Unit, Separated—phase, Linear Scaled Unit.
