摘要
简要论述了激光干涉计量中由于偏振光学元件引起的非线性误差对测量精度的影响,导出了计算公式,并给出计算实例。
Briefly described in this paper are the nonlinearity errors caused by optical polarized elements in laser interferomeric metrology and their influence on the precision. The calculation formula are also given.
出处
《光学仪器》
1993年第6期4-6,共3页
Optical Instruments
