摘要
金刚石薄膜在现代工业和军事中具有重要应用价值,但是其制备过程中仍然存在着诸多问题,影响了其产业化发展。本文采用数值模拟的方法对影响金刚石薄膜制备的关键因素直流电弧等离子体的流动传热过程进行了研究,获得了等离子体流动与传热过程中的流场分布、温度分布、电离度分布等有关参量的分布状况,为掌握和控制电弧等离子体流动传热过程提供了理论依据和指导。
Diamond films play an important role both in modern industry and military applications. But there are many intractable problems in producing process, which obstruct these developments in different industries. The key factor for producing process of diamond films, flow and heat transfer process of DC-arc plasma is studied by numerical simulation in this paper. And some related parameters, such as velocity distributing, temperature distributing, ionization degree and so on, are obtained. It is important to control flow and heat transfer process of DC-arc plasma by these parameters.
出处
《工业加热》
CAS
2004年第4期16-18,共3页
Industrial Heating
基金
国家863计划项目(863-715-Z38-03)
关键词
直流电弧
等离子体
数值模拟
速度分布
温度分布
DC-arc,plasma
numerical simulation
velocity distributing
temperature distributing