颇具竞争力的SOI硅集成技术

Competitive Potential of SOI Silicon Integrated Technology

主要讨论了SOI集成技术及其发展前景,介绍了SOI技术在VLSI应用方面 的优越性以及在微电子领域中的广泛应用。

SOI Integrated technology and it's development and application prospects are mainly discussed. After that, the advantages of SOI in VLSI applications and it's wide applications in microelectronics field are introduce.