摘要
采用液态镓作为离子源的FIB系统在材料科学研究领域可以起非常重要的作用。离子束聚焦于样品表面,在不同大小、束流及通入不同辅助气体的情况下,可分别实现图形刻蚀、绝缘和金属膜的沉淀,扫描离子成像等功能。该系统有三大用途:形貌观察,分辨率高达5nm;微刻蚀以及微沉淀。本文介绍了FIB技术的应用。
Focused ion beam(FIB) system based on gallium liquid-metal ion sources is a useful tool in the research work of materials science. It has three intended uses, that is the magnified observation with the resolution ratio as high as 5nm, the micro-etching and micro-deposition. This paper presented several examples for the applications of FIB techniques.
出处
《实验室研究与探索》
CAS
2004年第9期19-20,52,共3页
Research and Exploration In Laboratory
基金
国家自然科学基金项目(50171042)
