摘要
提出了一种多层1/4波长膜系的薄膜厚度监控系统的检测电路的设计方法,该方法采用了以锁定放大器为核心的检测电路。根据锁定放大器的工作原理,提出了利用锁定放大器检测微弱信号的实验方法,并指出了影响测量的几个参数。
A film thickness monitoring control method for quarter wave films is presented in this paper. By using this method, the optical constant of layer can be determined at the same process. This method can also be used to monitor the thickness of unquarter wave films according to the measurement of the film's reflectivity, and it has advantage of improving accuracy, increasing productivity and improving the film product quality.
出处
《探测与控制学报》
CSCD
北大核心
2004年第3期62-64,共3页
Journal of Detection & Control
关键词
监控
薄膜厚度
光学常数
monitoring control
thin-film thickness
optical constant
