用于聚焦X射线的高分辨菲涅尔波带板的设计

Designing of Extended Frsenel Zone Plates for Focusing X-rays

提出了一种在制备工艺所限定的最小线宽不变的条件下扩展菲涅尔波带板尺寸的方法。该方法在普通波带板设计方法的基础上,在波带宽度小于最小加工尺度的区域采用合并奇数带的方法扩展波带宽度,从而获得较大尺度的扩展菲涅尔波带板(EFZP)。给出了有关设计公式和设计实例,并对这种新型波带板的聚焦性能进行了定量的计算机模拟。分析结果表明,这种扩展型菲涅尔波带板具有更高的分辨本领和能量利用率。对聚焦光斑的次极大也有较好的抑制能力。

We propose a novel method for extending the effective size of Fresnel zone plates (FZP) under the limitation of the smallest structure that can be fabricated by lithography today. This kind of extended Fresnel zone plates (EFZP) consists of two parts: the inner part and the outer part. The inner part is the same as the conventional FZP, while in the outer part the zones are produced by suitable extension based on the conventional FZP. The principle of the EFZP, some related design formulas and simulated results are given, which indicate that EFZP possesses higher resolution and smaller sub-maximum noise than those of the corresponding conventional FZP.