部分相干激光匀束器的设计及应用

Design of Partial Coherent Laser Homogenizer and Its Applications

传统激光匀束器的设计是假设输入场为完全相干的,但对于准分子激光器等输出为部分相干场的光束匀滑并不适用。利用部分相干场的传输及衍射理论,开展了这一类激光器匀滑的方法研究。推导出部分相干场与完全相干场下激光匀束器的目标像面的关系式,总结出这一类器件的设计方法。仿真结果表明,上述方法设计的匀束器在全相干场下像面出现激烈的振荡,但在部分相干场下得到了理想的平滑输出强度分布。介绍了部分相干激光匀束器在新一代光刻机照明系统、材料加工、激光医疗中的应用前景。

Custom laser homogenizer can be applied only in full-coherent field but fail in partial-coherent laser field such as excimer. Propagation and diffraction theories of partial-coherent field was utilized to deduce the target image intensity relations between full-coherent and partial-coherent field, and to summarize the design method of these devices. The simulation results show that the output distribution of designed homogenizer oscillates greatly in full-coherent field but are quite smooth in partial-coherent field. Partial-coherent homogenizer's applications such as new generation photolithography, material processing and laser medical curing were also introduced.