摘要
厚膜布线技术在微电子技术领域应用广泛,厚膜柔性布线技术是一项全新的技术,通过自主设计厚膜柔性布线的Micropen系统,进行柔性布线实验研究,并对实验结果进行讨论,分析总结厚膜布线各影响因素与布线质量之间的关系,并进行理论分析,得出实现最佳厚膜布线质量与最高效率的条件,为Micropen系统的推广应用打下基础。
The technology of writing thick-film line is applied widely in micro-electronic, the technology of writing thick-film line flexibly is a new technology. By making an experiment write thick-film line flexibly with the Micropen system designed by ourselves,this paper discusses the result of the experiment,summarizes the relation of quality of thick-film line to all influencing factors,and analyzes its theory, then finds the condition of realizing the best thick-film line′s quality and the highest efficiency,thus provides a basis for popularizing the Micropen system.
出处
《电子机械工程》
2004年第4期52-56,共5页
Electro-Mechanical Engineering
关键词
Micropen
厚膜布线
微电子
Micropen system
writing thick-film line
micro-electronics
