化学气相淀积技术合成AIN超细粉末

ULTRAFINE AIN POWDER SYNTHESIZED BY CHEMICAL WAPOR DEPOSITION TECHNIQUE

在700～1000℃下,用无水AlCl_3和NH_3的化学气相淀积反应合成得到了AlN超细粉末,并研究了反应温度、总流量、AlCl_3浓度等对AlN粉末理化性质的影响。结果表明:(1)粉末的形态受反应温度和[NH_3]/[AlCl_3]的影响;⌒2)粉末的粒度与分布宽度随反应温度的增加、总流量的增加以及AlCl_3浓度的减小而减小;(3)产物AlN粉末中晶态AlN的含量随反应温度的升高而增加;(4)产物A1N中副产物NH_4Cl可经600℃热处理除去;(5)非晶态AlN在1450℃下可转变为晶态AlN,其粒径小于250nm,几何标准方差GSD小于1.3,氮含量大于33.5％,氧含量小于1％,氯含量小于0.1％,阳离子杂质含量小于1.5×10^(-2)％。

Ultrafine AIN powder was synthesized by chemical vapor deposition of anhydrous AlCl_3 and NH_3 at 700～1000℃.It is found that the shape of AlN particles varies with temperature and theratio of[NH_3]/[AlCl_3], and that the particle size and distribution of width decrease with the increase of temperature and total flow rate, but the decrease of AlCl_3 concentration. The content of crystalline AlN in the product increases with the increase of reaction temperature. The by-product, NH_4Cl which coexists with amorphous AlN, is easily eliminated by heating at 600℃. Amorphous AlN can be changed into crystalline AIN at 1450℃ with particle size less than 250nm, a geometric standard deviation (GSD) less than 1.3, content of nitrogen greater than 33.5％, content of oxygen, chlorine and metallics less than 1.0％, 0.1％, 1.5×10^(-2)％ respectively.