激光法合成SiC超细粉末物理化学过程的研究——Ⅰ.实验规律及粉末特性

STUDY ON PHYSICO-CHEMICAL PROCESS OF LASER SYNTHESIS OF ULTRAFINE SiC POWDER——Ⅰ. EXPERIMENTAL LAWS AND CHARACTERISTICS OF THE POWDER

用50W连续波CO_2激光器为热源,诱发SiH_4和C_2H_4反应,合成SiC超细粉末。实验确定了反应腔体内压力p、气源中的C/Si原子比、喷嘴内径2r以及激光功率密度与粉末特性之间的关系,并对合成的产物进行物理、化学表征。

Research results on synthesis of ultrafine SiC powder from gas-phase chemical reactions of SiH_4 and C_2H_4 induced by 50W CW CO_2 laser are presented. The relations between quality of the powder and cell pressure, C/Si atomic ratio in gas mixture,inner diameter of the nozzle and laser intensity are determined. The collected powder has been characterized physically and analyzed chemically.