摘要
论述了CVD金刚石薄膜基体材料的性质,从基体材料与金刚石的热膨胀系数的差异、晶格失配等方面,提出了选择金刚石薄膜基体材料的方法,并对硬质合金、铜、钢、硅等材料的基体预处理工艺作了综述.指出基体材料的选择和预处理工艺是优质金刚石薄膜制备的关键.
The properties of CVD diamond film substrates are introduced. The methods of selecting diamond film substrates are provided according to the thermal expansion mismatch and crystal mismatch between diamond and the substrates. The basic methods of the pre-treatment of CVD diamond film substrates such as cemented carbide substrates,copper,steel,silicon etc. are summarized too. The key factors of growing excellent diamond film are the selecting of substrates and the pre-treatment methods.
出处
《中原工学院学报》
CAS
2004年第4期42-45,共4页
Journal of Zhongyuan University of Technology
