发展中的MOEMS压力传感器

Developing MOEMS Pressure Sensor

微型光机电系统(MOEMS)技术是一门新兴的技术,其应用涉及光通信、光显示、数据存储和光学传感等诸多方面,而利用这种技术制作的光学压力传感器更是具有传统压力传感器无可比拟的优点。本文着重介绍了MOEMS压力传感器的结构、工作原理以及制作工艺,并简要介绍了MOEMS压力传感器阵列的结构和制作工艺。

MOEMS is a new developing technology, it has been used in optical communication, optical display, data storage, optical sensor and etc. The optical pressure sensor which is made by MOEMS also has many advantages. In this paper, the structure, operational principle and manufacture process of the MOEMS sensor are introduced, the structure and manufacture process of MOEMS sensor array are also described.