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取向铁电薄膜制备中主要工艺影响因素的研究进展

BRIEFLY ANALYSIS ON TECHNOLOGY FACTORS OF ORIENTED FERROELCTRIC THIN FILM
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摘要 取向铁电薄膜的取向度取决于其制造时的几个主要工艺影响因素,如基片特性、溶液 先驱体化学、热处理等。在取向铁电薄膜的研究中已经对这些工艺因素有了比较明确的认识, 作者概述了近年来这些工艺因素的研究进展。 The dgree of orientation of ferroelectric thin film briefly depended on three technological factors that are substract,solution chemistry,heat treatment condition which was investigated in detail in study of ferroelectric thin film.The understandings of the factors was summarized in this paper.
作者 贺海燕
机构地区 陕西科技大学材料科学与工程学院
出处 《陕西科技大学学报（自然科学版）》 2004年第5期153-156,共4页 Journal of Shaanxi University of Science & Technology
关键词 取向铁电薄膜 取向度 制备 基片特性 溶液先驱体化学 orientation ferroelectric thin film technological factor
分类号 TQ337.1 [化学工程—橡胶工业]
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参考文献33

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二级参考文献1

  • 1A. Towata,H. J. Hwang,M. Yasuoka,M. Sando. Seeding effects on crystallization and microstructure of sol-gel derived PZT fibers[J] 2000,Journal of Materials Science(16):4009～4013

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陕西科技大学学报（自然科学版）
2004年 第5期

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