热薄膜温差型CMOS风速风向传感器的研究和实现

Thermal-Film Temperature-Difference-Based CMOS Wind Sensor Design and Realization

介绍了一种基于 CMOS,能同时测量风速风向的硅集成传感器。通过保持芯片和环境温差恒定在设定值 ,测量芯片上对称区域由于风强迫对流而引起的温差 ,利用二维结构同时获得风速风向信息。本文首先介绍热薄膜温差型风速风向传感器原理 ,给出了具体结构和工艺 ,最后对样品进行了风洞测试 ,传感器能够测量风速 0～ 2 3 m/ s且 3

A kind of wind sensor based on CMOS process that can simultaneously measure both the wind velocity and direction is presented. Keeping the temperature difference between the chip surface and the surroundings constant, and measuring this temperature difference induced by the convection of the wind on the chip surface symmetrically, the wind can be measured with a 2-dimensional structure. The principal model, the structure and the realized process are given. By testing the sample chip in a wind tunnel, it shows that the sensor can measure the velocity in the range of 0 to 23 m/s with sensitivity fully 360°.