新型三轴微加速度计设计

A Novel Triaxial Micro Accelerometer

新型三轴微加速度计采用单一惯性质量 ,由四组L型梁对称布置支撑 ;利用差分电容作为检测接口 ,测量由于惯性力而引起惯性质量的微动位移 ;电容的差分结构有利于提高微加速度计的检测性能 ,实现系统静电力反馈闭环控制。利用ICP深刻蚀技术和静电键合技术等微机电系统工艺完成微加速度计的制作。具有体积小、灵敏度高、功耗小等优点 ,能够广泛应用于导航系统、汽车工业、PC游戏设备以及其他一些消费电子产品领域。

A novel concept of triaxial micro accelerometer is developed. This kind of triaxial micro-silicon accelerometer has only one inertial mass, symmetrically supported by four L-type elastic beams. Capacitive detecting method has been employed to sense the displacement of the inertial mass, caused by inertial forces in any direction. Differential capacitors have been designed to improve the sensitivity in the corresponding axis. ICP deep etching and electrostatic bonding systems have been maturely developed to meet the MEMS fabrication. This triaxial accelerometer can be fabricated using those technologies. For its merits of little volume, high sensitivity, low power consuming and etc., it will be widely applied in navigation system, automobile industry, PC game devices, other consumed electronic products, and so on.