从第七届国际真空展看扩散泵产品的变化

Up-to-date change of diffusion pumps:an outlook after visiting the 7th international vacuum products show

评述现有国产扩散泵产品的进展情况 ,存在的不足之处 ,今后应努力改进的方向。讨论测量扩散泵返油率的几种方法 。

Reviewing the development, advantages and disadvantages of differernt domestic vacuum diffusion pumps, the problem how to improve them is discussed in combination with their developmental trend. Some ways to measure the fluid (working medium) return rate of diffusion pumps are discussed and a suggestion is set out to measure the rate by use of (quartz) oscillator.