环境大气压的分布变化规律与差压式真空度测量的系统误差

Change of ambient atmosphere pressure distribution and systematic error of differential-pressure vacuum measurement

差压式真空度测量是低真空范围 (0 .1～ 10 0 k Pa或 1～ 76 0乇 )的一种常用测量方法。本文讨论了差压式真空度测量的局限性以及由于大气压强的变化而产生的测量系统误差 ,并给出了误差的修正方法 (公式 )。另外 ,还讨论了如何正确使用差压式真空度测量仪表和规范真空度计量单位的有关问题。

The differential-pressure vacuum measurement is a commonly-used measuring mode in the vacuum range from 0.1 kPa to 100 kPa or 1 to 760 torr. Its limitation and systematic errors due to change of ambient atmospheric pressure are discussed, as well as the method/equations to correct errors. Futhermore, how to use cerrectly the differential pressure vacuometers and normalize their measuring units are also discussed