丙酮环境下ECR微波等离子体辅助化学气相沉积类金刚石薄膜研究

Diamond-like carbon films deposited on optical glass substrate by using ECR microwave acetone plasma CVD method

利用电子回旋共振 (ECR)微波等离子体辅助化学气相沉积技术、工作气氛为丙酮 ,在光学玻璃衬底上得到了光滑、致密、均匀的类金刚石薄膜 .在工艺研究中 ,对等离子体中氧的存在及其作用进行了分析 .原子力显微镜分析表明 ,薄膜的表面粗糙度小于 1 0nm ,晶粒尺寸约为 1 0 0nm .拉曼光谱和中红吸收谱研究发现 ,薄膜具有强烈的荧光效应 ,含有sp1 ,sp2 ,sp3杂化C—C ,sp3杂化CH3,羰基CO、含氧多元环以及—COOH基等 .利用纳米力学探针以及近红区红外透射谱分析了薄膜的力学及光学性能 ,结果表明 ,薄膜的显微硬度接近 4GPa ,体弹性模量约为 1 1GPa ;薄膜在近红区完全没有吸收峰 ,折射系数为 1 .5 76 ;根据薄膜干涉花样 ,计算薄膜的沉积速率为 4 6 0nm h .

Smoothing, dense and uniform nano crystalline diamond like carbon films are prepared by using electron cyclotron resonance (ECR) microwave acetone plasma chemical vapor deposition (CVD) method. Atomic force microscope shows that, the surface roughness of this film is less than 10nm, the average grain size is about 100nm, and there are no distinct Raman shift peaks. Middle infrared spectra show the existence of sp 1, sp 2, and sp 3 mixed C—C bond, sp 3 mixed CH 3, CO, COOH and other oxygenic hydrocarbons in the film. The micro hardness is about 4 GPa, bulk elastic modulus is about 11 GPa tested by nano indentation. Without absorption in closed infrared area, the refractive index is 1 576 and the calculated deposition rate is 460 nm/h for the film.