离子注入掺碘聚醚砜薄膜的红外光谱分析

Infrared Spectra Analysis of Iodine Doped PES Film Before and After Ion Implantation

测定了未注入掺碘聚醚砜(PES)膜和离子注入掺碘PES膜的红外光谱,发现两者红外光谱不同.离子注入使掺碘PES膜的C—S键和C—O键断裂,但对掺碘PES膜的苯环没有破坏作用.Ar(苯环)—O—Ar吸收峰经离子注入后向低波数位移是由于离子注入导致键断裂,挥发性物质放出和富碳层的出现,并伴随着膜的致密化,使分子间的作用力显著增大.膜结构的变化引起了膜的电学和光学性质的变化.

The infrared spectra of iodine doped PES film and ion implanted iodine doped PES film have been measured.The infrared spectrum of iodine doped PES film after implanting with 15 keV N^+ and Ar^+ differs from that of the film before implantation.Ion implantation causes the break of C—S and C—O bonds,but does not destroy the benzene ring.The wave number of absorption peaks for Ar—O—Ar decreases after ion implantation as a result of breaking bonds, giving out gas and forming a rich carbon layer. Rich carbon densifies the film and increases the force between molecules.The change of structure of iodine doped PES film after implantation brings the changes of electric and optical properties.