摘要
自装配技术在物理、生物化学、MEMS以及纳米制造等领域得到了广泛应用,对该领域的研究显示出重要的应用前景和重大的理论价值,成为一个充满生机活力的热点。本文在阐述微器件自装配领域研究成果的基础上,重点介绍了应用毛细力、亲水(疏水)力作为驱动力实现微器件的二维和三维功能结构自装配过程,并指出了目前研究方法在纳米级微器件三维功能结构自装配中存在的问题,最后提出了综合应用介电泳力、毛细力及亲水(疏水)力实现纳米颗粒与三维基体自装配的方法。
The self-assembly technology is widely applied to physics,biochemistry,MEMS and nano-manufacturing fields etc.,and the researches in those fields show important application prospect and theoretical significance,which becomes a vital research hotspot. On the basis of introducing fruits of self-assembly fields,the paper presents the micro-device realizing the self-assembly 2D and 3D structures by virtue of capillary force,and hydrophobic force,and points out the problem of the self-assembly method for application of the nano-particle 3D self-assembly. In the end,a method for realizing the self-assembly mechanism and method between nano-particle and 3D base by ues of dielectrophoretic force,capillary force,and hydrophobic force are presented.
出处
《微纳电子技术》
CAS
2004年第10期18-23,共6页
Micronanoelectronic Technology
基金
江苏省自然科学基金资助项目(BK2003060)
关键词
自装配
毛细作用
疏水(亲水)力
介电泳力
纳米颗粒
self-assembly
capillary force
hydrophobic(hydrophilic)force
dielectrophoretic force
nano-particle
