摘要
文章概述了国内外双频激光干涉仪产品的现状,介绍了近年来双频激光干涉仪向高分辨率、高精度、高测速等几个方向的发展趋势。
The present state of the dual-frequency laser interferometer in the world is introduced in brief.The trends of development to high resolution,high accuracy,high measurement speed etc.are given.
出处
《激光与红外》
CAS
CSCD
北大核心
2004年第4期251-253,共3页
Laser & Infrared
关键词
双频激光干涉仪
外差干涉
分辨率
发展趋势
dual-frequency laser interferometer
heterodyne interferometer
high resolution
high accaracy
high measurment speed.
